Vertical vacuum annealing device
Wafer process-compatible full-scale production system for annealing, sintering, and polyimide curing, supporting high throughput with mini-batch and rapid cooling mechanism.
Uniform heating in a clean vacuum. Ideal for processes requiring high cleanliness and low oxygen concentration. Vertical quartz tube annealing device. Compatible with wafers up to 8 inches and various substrates. Automation and clean system achieved through the use of a CtO-C system. Stable temperature distribution performance from medium to high temperatures, with a rapid processing mechanism for short cycle times. A multifunctional heat treatment device capable of processing not only in vacuum but also in various atmospheres (inert, oxidation, reduction).
- Company：神港精機 東京支店
- Price：Other
